JPH0569311B2 - - Google Patents
Info
- Publication number
- JPH0569311B2 JPH0569311B2 JP14862385A JP14862385A JPH0569311B2 JP H0569311 B2 JPH0569311 B2 JP H0569311B2 JP 14862385 A JP14862385 A JP 14862385A JP 14862385 A JP14862385 A JP 14862385A JP H0569311 B2 JPH0569311 B2 JP H0569311B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- monolithic integrated
- circuit
- integrated circuit
- inductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 description 8
- 239000002131 composite material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- -1 GaAs Chemical class 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14862385A JPS629661A (ja) | 1985-07-05 | 1985-07-05 | モノリシック集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14862385A JPS629661A (ja) | 1985-07-05 | 1985-07-05 | モノリシック集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS629661A JPS629661A (ja) | 1987-01-17 |
| JPH0569311B2 true JPH0569311B2 (en]) | 1993-09-30 |
Family
ID=15456924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14862385A Granted JPS629661A (ja) | 1985-07-05 | 1985-07-05 | モノリシック集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629661A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677407A (ja) * | 1992-04-06 | 1994-03-18 | Nippon Precision Circuits Kk | 半導体装置 |
| TW275152B (en]) * | 1993-11-01 | 1996-05-01 | Ikeda Takeshi |
-
1985
- 1985-07-05 JP JP14862385A patent/JPS629661A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS629661A (ja) | 1987-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |